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Factors that impact mask lifetime, the future role of actinic inspection, and minimum mask dimensions for high-NA EUV.
Purchases of new photomask equipment are expected to grow over the next three years.
Bala Thumma will be responsible for D2S’ GPU-accelerated pixel-level dose correction (PLDC) technology, which enhances pattern fidelity and accuracy for writing all masks including curvilinear.
Part 1 of a two part article by Leo Pang of D2S
D2S CEO Aki Fjuimura comments on curvilinear masks for advanced EUV as part of this overview of what's needed to extend EUV.
D2S/eBeam Initiative’s Asmus Hetzel talks about key trends at EMLC, including curvilinear design, AI in inspection, and multi-beam mask writers