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Presented by D2S CEO Aki Fujimura at eBeam Initiative luncheon at SPIE AL.
Pixel-level dose correction improves the quality of masks written by multi-beam. Blog by D2S CEO Aki Fujimura.
Factors that impact mask lifetime, the future role of actinic inspection, and minimum mask dimensions for high-NA EUV.
Purchases of new photomask equipment are expected to grow over the next three years.
Bala Thumma will be responsible for D2S’ GPU-accelerated pixel-level dose correction (PLDC) technology, which enhances pattern fidelity and accuracy for writing all masks including curvilinear.
Part 1 of a two part article by Leo Pang of D2S